Kunio Takano

Title: Kunio Takano: Innovator in Substrate Processing Technology

Introduction

Kunio Takano is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 5 patents. His work focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents are a substrate processing system, a substrate processing method, and a control program. The substrate processing system is designed to perform processing on multiple substrates simultaneously. It includes a processing unit with several processing modules, a transfer unit for moving substrates, a loading/unloading unit for managing substrate storage, and a controller that oversees the entire operation. The controller is equipped with a standby mode setting unit that optimizes the timing of substrate processing based on the specific requirements of each task.

Another notable patent is a semiconductor manufacturing apparatus that features multiple process modules for executing desired processes on various substrates. This apparatus includes a scheduler that calculates cycle times to ensure that the time differences for each process remain within acceptable limits. It also has a transfer controller that manages the serial transfer of substrates according to a pre-established transfer plan.

Career Highlights

Kunio Takano is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing industry. His innovative work has positioned him as a key figure in advancing substrate processing technologies.

Collaborations

Throughout his career, Takano has collaborated with notable colleagues, including Takafumi Matsuhashi and Toshiharu Hirata. These partnerships have contributed to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Kunio Takano's contributions to substrate processing technology have made a significant impact on the semiconductor manufacturing industry. His innovative patents and collaborative efforts continue to drive advancements in this critical area of technology.