The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2013
Filed:
Sep. 25, 2009
Takashi Chino, Nirasaki, JP;
Satoshi Gomi, Nirasaki, JP;
Koichi Miyashita, Nirasaki, JP;
Minoru Nagasawa, Nirasaki, JP;
Yoshie Eda, Nirasaki, JP;
Takashi Chino, Nirasaki, JP;
Satoshi Gomi, Nirasaki, JP;
Koichi Miyashita, Nirasaki, JP;
Minoru Nagasawa, Nirasaki, JP;
Yoshie Eda, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of detecting an abnormal placement of a substrate W, which is carried out when a substrate W placed on a substrate table, in which a heateris disposed, is processed by heating. The method of detecting an abnormal placement of the substrate comprises the steps of: during processing of the substrate W, based on information about an electric output to the heateror information about a measured temperature of the substrate table, detecting of a maximum value and a minimum value of the electric output or the measured temperature, or an integrated value of the electric output or the measured temperature; and judging of the abnormal placement of the substrate based on the maximum value and the minimum value detected, or the integrated value detected.