Location History:
- Nirasaki, JP (2013)
- Tokyo, JP (1985 - 2024)
Company Filing History:
Years Active: 1985-2024
Title: Minoru Nagasawa: Innovator in Substrate Processing Technology
Introduction
Minoru Nagasawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His innovative work has advanced the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Nagasawa's latest patents include a substrate processing system, substrate processing method, and control program. This substrate processing system is designed to perform processing on multiple substrates simultaneously. It features a processing unit with several processing modules, each configured to execute a specific process. Additionally, it includes a transfer unit equipped with a transfer device to move substrates between processing modules, a loading/unloading unit for managing substrate storage, and a controller that oversees the entire operation. The controller is capable of setting standby periods for substrates based on the processing content, optimizing the workflow.
Another notable patent is a semiconductor manufacturing apparatus that incorporates multiple process modules for executing desired processes on various substrates. This apparatus includes transfer modules that facilitate the serial transfer of substrates to the process modules. A scheduler within the system calculates cycle times to ensure that the time required for each process remains within an acceptable range, thereby generating an efficient transfer plan.
Career Highlights
Throughout his career, Minoru Nagasawa has worked with esteemed companies such as Tokyo Electron Limited and Nippon Chemi-con Corporation. His experience in these organizations has allowed him to refine his expertise in semiconductor manufacturing and substrate processing technologies.
Collaborations
Nagasawa has collaborated with notable professionals in his field, including Toshiharu Hirata and Takafumi Matsuhashi. These collaborations have contributed to the advancement of innovative solutions in substrate processing.
Conclusion
Minoru Nagasawa's contributions to substrate processing technology and semiconductor manufacturing have established him as a key figure in the industry. His patents reflect a commitment to innovation and efficiency, making a lasting impact on the field.