The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2022
Filed:
Apr. 02, 2020
Tokyo Electron Limited, Tokyo, JP;
Katsuhito Hirose, Nirasaki, JP;
Koichi Miyashita, Nirasaki, JP;
Hiroshi Hirose, Nirasaki, JP;
Satoshi Gomi, Nirasaki, JP;
Yasunori Kumagai, Nirasaki, JP;
Takashi Yoshiyama, Hachiouji, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A processing apparatus for processing a substrate includes: a plurality of end devices; a low-level controller configured to control specific end devices among the plurality of end devices; and a module controller configured to execute a recipe for processing the substrate, to specify control steps satisfying a specific condition among a plurality of control steps of the recipe, and to transmit the specified control steps to the low-level controller, wherein the low-level controller controls the specific end devices based on the control steps received from the module controller.