Location History:
- Chigasaki, JP (2001)
- Shizuoka-ken, JP (2012 - 2014)
- Sizuoka, JP (2014)
- Susono, JP (2015)
Company Filing History:
Years Active: 2001-2015
Title: Satoru Toyoda: Innovator in Film Formation Technology
Introduction
Satoru Toyoda is a prominent inventor based in Shizuoka-ken, Japan. He has made significant contributions to the field of film formation technology, holding a total of seven patents. His innovative work has advanced the methods used in the production of various films, particularly in semiconductor applications.
Latest Patents
Among his latest patents is a film formation apparatus designed to enhance the efficiency of film deposition processes. This apparatus features a chamber that houses both a body to be processed and a target, allowing for optimal interaction between the two. It includes a first magnetic field generation section that creates a magnetic field in the inner space, a second magnetic field generation section that generates a perpendicular magnetic field, and a third magnetic field generation section positioned upstream of the target.
Additionally, Toyoda has developed methods for the formation of cobalt (Co) films and copper (Cu) interconnection films. The Co film is formed by supplying cobalt alkylamidinate along with a reducing gas, while the Cu interconnection film is deposited on the surface of the Co film, enhancing the overall functionality of the semiconductor devices.
Career Highlights
Satoru Toyoda has built a successful career at Ulvac, Inc., where he continues to innovate in the field of film formation technology. His work has been instrumental in improving the processes used in semiconductor manufacturing, contributing to advancements in the industry.
Collaborations
Throughout his career, Toyoda has collaborated with notable colleagues, including Harunori Ushikawa and Narishi Gonohe. These collaborations have fostered a creative environment that has led to the development of cutting-edge technologies in film formation.
Conclusion
Satoru Toyoda's contributions to film formation technology have made a significant impact on the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.