The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2015
Filed:
Jul. 15, 2010
Shuji Kodaira, Susono, JP;
Tomoyuki Yoshihama, Susono, JP;
Koukichi Kamada, Susono, JP;
Kazumasa Horita, Susono, JP;
Junichi Hamaguchi, Susono, JP;
Shigeo Nakanishi, Susono, JP;
Satoru Toyoda, Susono, JP;
Shuji Kodaira, Susono, JP;
Tomoyuki Yoshihama, Susono, JP;
Koukichi Kamada, Susono, JP;
Kazumasa Horita, Susono, JP;
Junichi Hamaguchi, Susono, JP;
Shigeo Nakanishi, Susono, JP;
Satoru Toyoda, Susono, JP;
ULVAC, Inc., Chigasaki-Shi, JP;
Abstract
A film formation apparatus includes: a chamber having an inner space in which both a body to be processed and a target are disposed so that the body to be processed and the target are opposed to each other, a first magnetic field generation section generating a magnetic field in the inner space to which the target is exposed; a second magnetic field generation section generating a perpendicular magnetic field so as to allow perpendicular magnetic lines of force thereof to pass between the target the body to be processed; and a third magnetic field generation section disposed at upstream side of the target as seen from the second magnetic field generation section.