Company Filing History:
Years Active: 2020-2025
Title: Satoru Teruuchi: Innovator in Plasma Processing Technology
Introduction
Satoru Teruuchi is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 5 patents. His work focuses on developing advanced systems and methods for monitoring and controlling plasma processes.
Latest Patents
Teruuchi's latest patents include a plasma monitoring system, a plasma monitoring method, and a monitoring device. The plasma monitoring system comprises a monitoring device and a control device. The monitoring device is designed to be placed on a stage within a plasma processing apparatus. It features a plate-shaped base substrate and multiple spectroscopes with upward-facing optical axes, strategically positioned to measure light emission intensities of the plasma. The control device processes the light emission intensity data to create a distribution profile of the plasma within the apparatus.
Another notable patent is the substrate processing system and temperature control method. This system includes a substrate processing apparatus and a control device. The apparatus features a chamber with a placing table that holds a substrate. The table incorporates an electrostatic chuck with several division regions, each equipped with a heater. The control device measures the resistance values of the heaters, estimates the temperatures of the division regions, and regulates the power supplied to each heater based on the estimated temperatures.
Career Highlights
Satoru Teruuchi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in advancing plasma processing technologies.
Collaborations
Throughout his career, Teruuchi has collaborated with notable colleagues, including Dai Kitagawa and Katsuyuki Koizumi. These partnerships have contributed to the development of cutting-edge technologies in the field.
Conclusion
Satoru Teruuchi's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative systems and methods continue to shape advancements in the industry.