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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10699883 B1

PDFFull Text
Date of Patent:
Jun. 30, 2020

Filed:

Jun. 01, 2015

Plasma processing apparatus, method of operating plasma processing apparatus, and power supply device

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Satoru Teruuchi, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Studebaker & Brackett PC

Primary Examiner:

Dana Ross

Assistant Examiner:

Ayub A Maye

Int. Cl.
CPC ...
H01J 37/32 (2006.01); H05H 1/46 (2006.01); H01L 21/02 (2006.01); H01L 21/3065 (2006.01); H01L 21/67 (2006.01); H05B 3/28 (2006.01); F27D 11/02 (2006.01); H01L 21/683 (2006.01); H05B 3/62 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); F27D 11/02 (2013.01); H01J 37/32091 (2013.01); H01J 37/32908 (2013.01); H01L 21/02 (2013.01); H01L 21/3065 (2013.01); H01L 21/67069 (2013.01); H01L 21/67103 (2013.01); H01L 21/67248 (2013.01); H01L 21/6831 (2013.01); H05B 3/283 (2013.01); H05B 3/62 (2013.01); H05H 1/46 (2013.01); H01J 37/32183 (2013.01); H01J 37/32834 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/334 (2013.01); H05H 2001/4682 (2013.01);
Abstract

A plasma processing apparatus according to an embodiment includes a processing container, a mounting table, a plurality of heaters, and a power supply device. The mounting table is provided in the processing container. The plurality of heaters are provided in the mounting table. The power supply device supplies electric power to the plurality of heaters. The power supply device includes a plurality of transformers and a plurality of zero-cross control type solid state relays (SSRs). The plurality of transformers are configured to step down a voltage from an alternating-current power source. Each of the plurality of transformers includes a primary coil and a secondary coil. The primary coil is connected to the alternating-current power source. Each of the plurality of SSRs is provided between one corresponding heater among the plurality of heaters and the secondary coil of one corresponding transformer among the plurality of transformers.

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