This inventor holds 9 USPTO granted patents and 3 EPO patents. Top assignees: Novellus Systems Incorporated, Aixtron Se, Aixtron, Inc.. Active years: 1999-2015.
Location History:
- Blacksburg, VA (US) (1999)
- San Ramon, CA (US) (2000 - 2015)
Company Filing History:
3 out of 993 
1 out of 78 
1 out of 21 
Years Active: 1999-2015
Title: Innovations of Sasangan Ramanathan
Introduction
Sasangan Ramanathan is a prominent inventor based in San Ramon, CA, known for his contributions to the field of thin film technology. With a total of 9 patents to his name, he has made significant advancements in atomic layer deposition processes.
Latest Patents
Ramanathan's latest patents include a method for forming a TiSiN thin film layer using atomic layer deposition. This method involves a series of processes, including preheating a substrate, forming a TiN film, and subsequently forming a SiN film, ultimately resulting in a TiSiN film with specific gas pressure and composition parameters. Another notable patent is for transient enhanced atomic layer deposition, which describes a process where a wafer is exposed to chemically reactive precursor doses to achieve uniform film deposition.
Career Highlights
Throughout his career, Ramanathan has worked with notable companies such as Novellus Systems Incorporated and Aixtron, Inc. His expertise in thin film technology has positioned him as a key player in the industry.
Collaborations
Ramanathan has collaborated with esteemed colleagues, including Gi Youl Kim and Thomas E Seidel, contributing to various innovative projects in the field.
Conclusion
Sasangan Ramanathan's work in atomic layer deposition and thin film technology showcases his innovative spirit and dedication to advancing the field. His patents reflect a commitment to excellence and a drive to push the boundaries of technology.