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For the Inventor, By the Inventor

Fremont, CA, United States of America

Saravanapriyan Sriraman

USPTO Granted Patents = 34 

Average Co-Inventor Count = 3.3

ph-index = 8

Forward Citations = 256(Granted Patents)


Company Filing History:

goldMedal34 out of 3,768 
 
Lam Research Corporation
 patents

Years Active: 2007-2024

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34 patents (USPTO):
1. 12068152 - Semiconductor substrate bevel cleaning (2024-08-20),
2. 11887819 - Systems for cooling RF heated chamber components (2024-01-30),
3. 11704463 - Method of etch model calibration using optical scatterometry (2023-07-18),
4. 11692732 - Air cooled faraday shield and methods for using the same (2023-07-04),
5. 11624981 - Resist and etch modeling (2023-04-11),
6. 11538666 - Multi-zone cooling of plasma heated window (2022-12-27),
7. 11495441 - Systems for cooling RF heated chamber components (2022-11-08),
8. 11424103 - Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment (2022-08-23),
9. 11171021 - Internal plasma grid for semiconductor fabrication (2021-11-09),
10. 10997345 - Method of etch model calibration using optical scatterometry (2021-05-04),
11. 10825661 - Systems for cooling RF heated chamber components (2020-11-03),
12. 10690374 - Air cooled faraday shield and methods for using the same (2020-06-23),
13. 10585347 - Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework (2020-03-10),
14. 10572697 - Method of etch model calibration using optical scatterometry (2020-02-25),
15. 10534257 - Layout pattern proximity correction through edge placement error prediction (2020-01-14),

As a client of idiyas.com, I'm happy to assist you with the article about inventor Saravanapriyan Sriraman. Here is the structured information based on the given data:

Title: The Innovative Works of Saravanapriyan Sriraman in Fremont, CA

Introduction: Saravanapriyan Sriraman is a prolific inventor based in Fremont, CA, with an impressive track record of 33 patents to his name.

Latest Patents:

1. Systems for cooling RF heated chamber components: Saravanapriyan's groundbreaking invention involves a plasma processing device with innovative features like a dielectric window, a vacuum chamber, and an air amplifier to enhance the cooling process.

2. Method of etch model calibration using optical scatterometry: His computer-implemented methods optimize process simulation models for semiconductor device fabrication operations, incorporating advanced techniques like optical scatterometry for calibration.

Career Highlights: Saravanapriyan Sriraman is associated with Lam Research Corporation, a prominent player in the field of semiconductor equipment manufacturing.

Collaborations: In his professional journey, Saravanapriyan has collaborated with standout individuals like Alex Paterson and Alexander Miller Paterson, showcasing a strong network within the industry.

Conclusion: Saravanapriyan Sriraman's contributions to the field of technology, particularly in semiconductor fabrication and plasma processing, highlight his dedication to innovation and problem-solving. His patents and collaborations stand as testaments to his impactful work in his field.

I hope this article captures the essence of Saravanapriyan Sriraman's impressive work and contributions. Let me know if you need any further details or adjustments.

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