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For the Inventor, By the Inventor

Fremont, CA, United States of America

Saravanapriyan Sriraman

This inventor holds 36 USPTO granted patents and 10 published patent applications and 2 EPO patents, primarily in Semiconductor Processing. Top assignee: Lam Research Corporation. Active years: 2007-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Saravanapriyan Sriraman. Retrieved from https://idiyas.com/inventor/saravanapriyan-sriraman

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 36 

% Patents Active = 97.2

 

Average Co-Inventor Count = 3.3

ph-index = 8

Forward Citations = 283(Granted Patents)


Company Filing History:

goldMedal36 out of 3,940 
 
Lam Research Corporation
 patents

Years Active: 2007-2026

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Areas of Expertise:
Etch Profiling
Plasma Control
Substrate Cleaning
RF Heating
Optical Scatterometry
Gas Injection
Photoresist Design
Cooling Systems
Faraday Shield
Wafer Processing
Proximity Correction
Multi-Zone Cooling
36 patents (USPTO):Explore Patents
1. 12695066 - Moveable edge rings with reduced capacitance variation for substrate processing systems (2026-07-28),
2. 12530021 - Performance predictors for semiconductor-manufacturing processes (2026-01-20),
3. 12068152 - Semiconductor substrate bevel cleaning (2024-08-20),
4. 11887819 - Systems for cooling RF heated chamber components (2024-01-30),
5. 11704463 - Method of etch model calibration using optical scatterometry (2023-07-18),
6. 11692732 - Air cooled faraday shield and methods for using the same (2023-07-04),
7. 11624981 - Resist and etch modeling (2023-04-11),
8. 11538666 - Multi-zone cooling of plasma heated window (2022-12-27),
9. 11495441 - Systems for cooling RF heated chamber components (2022-11-08),
10. 11424103 - Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment (2022-08-23),
11. 11171021 - Internal plasma grid for semiconductor fabrication (2021-11-09),
12. 10997345 - Method of etch model calibration using optical scatterometry (2021-05-04),
13. 10825661 - Systems for cooling RF heated chamber components (2020-11-03),
14. 10690374 - Air cooled faraday shield and methods for using the same (2020-06-23),
15. 10585347 - Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework (2020-03-10),

As a client of idiyas.com, I'm happy to assist you with the article about inventor Saravanapriyan Sriraman. Here is the structured information based on the given data:

Title: The Innovative Works of Saravanapriyan Sriraman in Fremont, CA

Introduction: Saravanapriyan Sriraman is a prolific inventor based in Fremont, CA, with an impressive track record of 33 patents to his name.

Latest Patents:

1. Systems for cooling RF heated chamber components: Saravanapriyan's groundbreaking invention involves a plasma processing device with innovative features like a dielectric window, a vacuum chamber, and an air amplifier to enhance the cooling process.

2. Method of etch model calibration using optical scatterometry: His computer-implemented methods optimize process simulation models for semiconductor device fabrication operations, incorporating advanced techniques like optical scatterometry for calibration.

Career Highlights: Saravanapriyan Sriraman is associated with Lam Research Corporation, a prominent player in the field of semiconductor equipment manufacturing.

Collaborations: In his professional journey, Saravanapriyan has collaborated with standout individuals like Alex Paterson and Alexander Miller Paterson, showcasing a strong network within the industry.

Conclusion: Saravanapriyan Sriraman's contributions to the field of technology, particularly in semiconductor fabrication and plasma processing, highlight his dedication to innovation and problem-solving. His patents and collaborations stand as testaments to his impactful work in his field.

I hope this article captures the essence of Saravanapriyan Sriraman's impressive work and contributions. Let me know if you need any further details or adjustments.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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