IDiyas

For the Inventor, By the Inventor

Singapore, Singapore

Sarath Babu

USPTO Granted Patents = 16 

Average Co-Inventor Count = 5.3

ph-index = 3

Forward Citations = 38(Granted Patents)


Company Filing History:

goldMedal16 out of 13,684 
 
Applied Materials, Inc.
 patents

Years Active: 2020-2025

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16 patents (USPTO):
1. 12476086 - Spray-coated electrostatic chuck design (2025-11-18),
2. 12148629 - Shutter disk (2024-11-19),
3. 12100577 - High conductance inner shield for process chamber (2024-09-24),
4. 12080522 - Preclean chamber upper shield with showerhead (2024-09-03),
5. 11881385 - Methods and apparatus for reducing defects in preclean chambers (2024-01-23),
6. 11862480 - Shutter disk (2024-01-02),
7. D973609 - Upper shield with showerhead for a process chamber (2022-12-27),
8. D971167 - Lower shield for a substrate processing chamber (2022-11-29),
9. 11476097 - Common electrostatic chuck for differing substrates (2022-10-18),
10. 11289357 - Methods and apparatus for high voltage electrostatic chuck protection (2022-03-29),
11. 11251028 - Pre-clean chamber with integrated shutter garage (2022-02-15),
12. 11171017 - Shutter disk (2021-11-09),
13. D931241 - Lower shield for a substrate processing chamber (2021-09-21),
14. 11043406 - Two piece shutter disk assembly with self-centering feature (2021-06-22),
15. D913979 - Inner shield for a substrate processing chamber (2021-03-23),

Title: The Innovative Contributions of Sarath Babu

Introduction

Sarath Babu is a prominent inventor based in Singapore, known for his significant contributions to the field of technology and engineering. With a total of 16 patents to his name, he has made remarkable advancements in various applications, particularly in the semiconductor industry.

Latest Patents

Among his latest patents is the "Spray-coated electrostatic chuck design." This invention includes a substrate support featuring a metal body with a substrate face, multiple lift pin holes, and a dielectric coating. The design aims to enhance the efficiency of substrate handling in manufacturing processes. Another notable patent is the "Shutter disk," which comprises materials such as titanium, barium, and cerium. This invention is designed for physical vapor deposition (PVD) applications, minimizing outgassing and controlling defects during substrate etching.

Career Highlights

Sarath Babu is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work focuses on developing innovative solutions that improve manufacturing processes and product quality. His expertise and creativity have positioned him as a valuable asset in his field.

Collaborations

Throughout his career, Sarath has collaborated with talented individuals, including Ananthkrishna Jupudi and Yuichi Wada. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Sarath Babu's contributions to technology and engineering through his patents and collaborations highlight his role as a leading inventor in the industry. His work continues to influence advancements in semiconductor manufacturing and related fields.

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