The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

Apr. 22, 2020
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Sarath Babu, Singapore, SG;

Ananthkrishna Jupudi, Singapore, SG;

Yueh Sheng Ow, Singapore, SG;

Junqi Wei, Singapore, SG;

Kelvin Tai Ming Boh, Singapore, SG;

Kang Zhang, Singapore, SG;

Yuichi Wada, Chiba, JP;

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
U.S. Cl.
CPC ...

Find Patent Forward Citations

Babu, Sarath. (2022). Upper shield with showerhead for a process chamber (U.S. Patent No. D973609). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/D973609

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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