The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Apr. 24, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Yueh Sheng Ow, Singapore, SG;
Yuichi Wada, Chiba, JP;
Junqi Wei, Singapore, SG;
Kang Zhang, Singapore, SG;
Ananthkrishna Jupudi, Singapore, SG;
Sarath Babu, Singapore, SG;
Kok Seong Teo, Singapore, SG;
Kok Wei Tan, Singapore, SG;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Apparatus and methods use a unique process kit to protect a processing volume of a process chamber. The process kit includes a shield with a frame configured to be insertable into a shield and a foil liner composed of a metallic material that is attachable to the frame at specific points. The specific attachment points are spaced apart to produce an amount of flexibility based on a malleability of the metallic material. The amount of flexibility ranges from approximately 2.5 to approximately 4.5.