Kok Seong Teo

Title: Innovations by Kok Seong Teo

Introduction

Kok Seong Teo is a notable inventor based in Singapore, known for his contributions to the field of process chamber technology. He has been instrumental in developing methods and apparatus that enhance the efficiency and reliability of manufacturing processes. With a total of 2 patents, his work has significantly impacted the industry.

Latest Patents

Kok Seong Teo's latest patents include innovative solutions aimed at improving process chamber performance. One of his patents, titled "Methods and apparatus for reducing defects in preclean chambers," introduces a unique process kit designed to protect the processing volume of a process chamber. This process kit features a shield with a frame that can be inserted into a shield, along with a foil liner made of metallic material. The attachment points of the foil liner are strategically spaced to provide flexibility based on the malleability of the metallic material, with flexibility ranging from approximately 2.5 to 4.5.

Another significant patent is "Methods and apparatus for prevention of component cracking using stress relief layer." This invention focuses on protecting parts of a process chamber from the thermal cycling effects of deposited materials. The method involves wet etching the part with a weak alkali or acid, bead blasting for cleaning, and applying a stress relief layer that maintains the structural integrity of the part. The stress relief layer is designed to be between approximately 50 microns to approximately 250 microns thick, ensuring durability against thermal cycling.

Career Highlights

Kok Seong Teo is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to collaborate with other talented professionals and contribute to groundbreaking innovations in the industry.

Collaborations

Some of Kok Seong Teo's coworkers include Yuichi Wada and Kok Wei Tan. Their collaborative efforts have fostered an environment of innovation and creativity, leading to advancements in process chamber technologies.

Conclusion

Kok Seong Teo's contributions to the field of process chamber technology through his patents and work at Applied Materials, Inc. highlight his role as a significant inventor. His innovative solutions continue to shape the industry and improve manufacturing processes.