Kok Wei Tan

Title: Innovations by Kok Wei Tan

Introduction

Kok Wei Tan is a notable inventor based in Singapore, recognized for his contributions to the field of process chamber technology. He holds a total of 2 patents that focus on enhancing the efficiency and reliability of manufacturing processes.

Latest Patents

His latest patents include "Methods and apparatus for reducing defects in preclean chambers" and "Methods and apparatus for prevention of component cracking using stress relief layer." The first patent describes a unique process kit designed to protect the processing volume of a process chamber. This kit features a shield with a frame that can be inserted into a shield, along with a foil liner made of metallic material. The attachment points of the foil liner are strategically spaced to allow for flexibility, which ranges from approximately 2.5 to 4.5. The second patent focuses on protecting parts of a process chamber from the thermal cycling effects of deposited materials. This method involves wet etching the part with a weak alkali or acid, bead blasting for cleaning, and applying a stress relief layer that maintains the structural integrity of the part.

Career Highlights

Kok Wei Tan is currently employed at Applied Materials, Inc., where he continues to innovate and develop new technologies. His work significantly contributes to advancements in the semiconductor manufacturing industry.

Collaborations

He collaborates with talented individuals such as Yuichi Wada and Kok Seong Teo, enhancing the innovative capabilities of his team.

Conclusion

Kok Wei Tan's work exemplifies the spirit of innovation in the field of process chamber technology. His patents not only address critical challenges in manufacturing but also pave the way for future advancements in the industry.