The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2024
Filed:
Oct. 25, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Sarath Babu, Singapore, SG;
Ananthkrishna Jupudi, Singapore, SG;
Yueh Sheng Ow, Singapore, SG;
Junqi Wei, Singapore, SG;
Kelvin Boh, Singapore, SG;
Yuichi Wada, Chiba, JP;
Kang Zhang, Singapore, SG;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a process chamber includes a tubular body having a central opening configured to surround a substrate support, wherein sidewalls of the tubular body do not include any through holes; and a top plate coupled to an upper end of the tubular body and substantially covering the central opening, wherein the top plate has a gas inlet and has a diameter that is greater than an outer diameter of the tubular body, and wherein the tubular body extends straight down from the top plate.