Company Filing History:
Years Active: 2025
Title: Innovations by Robert Joachim
Introduction
Robert Joachim is an accomplished inventor based in Beaverton, OR (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to device fabrication.
Latest Patents
One of Joachim's latest patents is focused on gate cut structures. This patent provides techniques to form semiconductor devices with gate cut structures that enhance device performance. The design features adjacent semiconductor regions, such as fins or nanoribbons, with a gate structure extending over them. The gate cut structure interrupts the gate structure and extends between adjacent source or drain regions. Additionally, a dielectric liner is applied to the sidewalls and top surfaces of the source or drain regions, which also extends up the sidewall of the gate cut structure. In some instances, the gate structure includes a gate dielectric on the semiconductor regions but not on the gate cut structure, allowing for effective contact with the source or drain regions.
Another notable patent by Joachim involves extreme ultraviolet lithography patterning with assist features. This innovation improves EUV patterning by utilizing assist features that enhance the coverage of absorber material in the EUV mask. The process involves patterning semiconductor fins and assist features into a substrate, which are then buried in fill material. A mask is created to expose the assist features while covering the semiconductor fins, leading to the effective use of the protected active fins in transistor devices.
Career Highlights
Robert Joachim is currently employed at Intel Corporation, where he continues to push the boundaries of semiconductor technology. His work has been instrumental in advancing the capabilities of integrated circuits and related systems.
Collaborations
Throughout his career, Joachim has collaborated with notable colleagues, including Leonard P. Guler and Tahir Ghani. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Robert Joachim's contributions to semiconductor technology through his patents and work at Intel Corporation highlight his role as a leading inventor in the field. His innovative techniques are paving the way for advancements in semiconductor devices and integrated circuits.