Average Co-Inventor Count = 1.8

ph-index = 19

Forward Citations = 1,729(Granted Patents)

Company Filing History:

15 out of 478

Brooks Automation Gmbh

patents

10 out of 916

Varian Semiconductor Equipment Associates, Inc.

patents

5 out of 777

Varian Associates, Inc.

Ibis Technology Corporation

patents

6. 1 out of 832,680

Other

patents

Years Active: 1983-2014

where 'Filed Patents' based on already Granted Patents

35 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 8669540 - System and method for gas leak control in a substrate holder (2014-03-11),

2. 8585115 - Method and apparatus for lifting a horizontally-oriented substrate from a cassette (2013-11-19),

3. 8450193 - Techniques for temperature-controlled ion implantation (2013-05-28),

4. 8319196 - Technique for low-temperature ion implantation (2012-11-27),

5. 7993698 - Techniques for temperature controlled ion implantation (2011-08-09),

6. 7935942 - Technique for low-temperature ion implantation (2011-05-03),

7. 7655933 - Techniques for temperature-controlled ion implantation (2010-02-02),

8. 7595972 - Clamp for use in processing semiconductor workpieces (2009-09-29),

9. 7528392 - Techniques for low-temperature ion implantation (2009-05-05),

10. 6863736 - Shaft cooling mechanisms (2005-03-08),

11. 6299404 - Substrate transport apparatus with double substrate holders (2001-10-09),

12. 6261048 - Multi-level substrate processing apparatus (2001-07-17),

13. 6193506 - Apparatus and method for batch thermal conditioning of substrates (2001-02-27),

14. 6158941 - Substrate transport apparatus with double substrate holders (2000-12-12),

15. 6079927 - Automated wafer buffer for use with wafer processing equipment (2000-06-27),

Title: Innovator Spotlight: Richard S Muka - Pioneering Inventor from Topsfield, MA

Introduction:

Richard S Muka, a distinguished inventor hailing from Topsfield, MA, has left an indelible mark in the realm of technological advancements. With an impressive portfolio of 35 patents to his name, Muka has been at the forefront of innovation, revolutionizing the landscape with his groundbreaking solutions.

Latest Patents:

Among his latest patents is the 'System and Method for Gas Leak Control in a Substrate Holder,' showcasing Muka's proficiency in developing cutting-edge technologies. This invention features an electrostatic clamp with a unique heating block design, aimed at enhancing substrate heating efficiency while ensuring gas leak control.

Another notable invention by Muka is the 'Method and Apparatus for Lifting a Horizontally-Oriented Substrate from a Cassette.' This innovative system provides a reliable mechanism for safely removing horizontally oriented substrates from cassettes, demonstrating Muka's commitment to solving complex engineering challenges.

Career Highlights:

Throughout his illustrious career, Richard S Muka has made significant contributions to various industry-leading organizations. Noteworthy among his professional affiliations are his stints at Brooks Automation GmbH and Varian Semiconductor Equipment Associates, Inc. Muka's expertise and ingenuity have shaped the success of these renowned companies, earning him a reputation as a trailblazer in the field.

Collaborations:

Collaboration plays a pivotal role in driving innovation, and Muka has had the privilege of working alongside esteemed colleagues such as Jonathan Gerald England and Julian G Blake. Together, they have synergized their talents to deliver groundbreaking solutions, further solidifying Muka's legacy as a collaborative and visionary inventor.

Conclusion:

In conclusion, Richard S Muka's remarkable journey as an inventor exemplifies a relentless pursuit of excellence and a commitment to pushing the boundaries of technological innovation. His inventive prowess and dedication to advancing the field continue to inspire generations of aspiring innovators, underscoring his enduring impact on the world of patents and inventions.

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