The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
Nov. 08, 1999
Applicant:
Inventor:
Richard S. Muka, Topsfield, MA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 1/04 ;
U.S. Cl.
CPC ...
B65G 1/04 ;
Abstract
A substrate processing apparatus having a substrate transport and substrate processing chambers. The substrate transport has a transport chamber and a transport mechanism. The transport mechanism has a rotatable drive, an arm pivotably connected to the drive to pivot in vertical directions, and a substrate holder pivotably connected to an end of the arm by an articulating wrist. The arm can vertically move the substrate holder up and down. The substrate processing chambers are stationarily connected to the transport chamber at two different vertical levels.