Milpitas, CA, United States of America

Richard Erich Schuster

USPTO Granted Patents = 21 

 

Average Co-Inventor Count = 5.1

ph-index = 5

Forward Citations = 141(Granted Patents)


Location History:

  • Miplitas, CA (US) (2022)
  • Milpitas, CA (US) (1998 - 2023)

Company Filing History:


Years Active: 1998-2023

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21 patents (USPTO):Explore Patents

Title: Innovations by Richard Erich Schuster: A Pioneer in Thermal and Electrostatic Technologies

Introduction

Richard Erich Schuster, a prolific inventor based in Milpitas, California, holds an impressive portfolio of 21 patents that demonstrate his innovative contributions to thermal and electrostatic technologies. His work has significantly impacted various industries through cutting-edge inventions that enhance efficiency and performance.

Latest Patents

Among his recent achievements, Schuster's notable inventions include the **Multiple Zone Heater**, which features a plurality of thermocouples that allow for independent monitoring of different heater zones. This design incorporates a unique process for hermetically sealing the thermocouples' leads, ensuring durability and resistance to both the internal atmosphere of the heater shaft and any process chemicals utilized in the associated process chamber.

Another innovative creation is the **Semiconductor Substrate Support with Multiple Electrodes**, which centers on a method for manufacturing an electrostatic chuck with multiple ceramic chucking electrodes. This advanced assembly technique employs metallic aluminum, combining heat treatment at temperatures ranging from 770°C to 1200°C in a non-oxygenated atmosphere, to achieve precise electrode patterns with machined exclusion slots filled with epoxy or other materials.

Career Highlights

Throughout his career, Richard Erich Schuster has lent his expertise to renowned companies, including Component Re-engineering Company, Inc. and Watlow Electric Manufacturing Company. His inventive spirit and technical skills have fostered advancements in thermal management and semiconductor manufacturing processes.

Collaborations

Schuster has also collaborated with notable colleagues, such as Alfred Grant Elliot and Frank R. Balma, contributing to shared innovations that reflect the synergy of ideas and expertise within the field. These partnerships play a vital role in promoting creativity and advancing technical solutions in the industries they serve.

Conclusion

In conclusion, Richard Erich Schuster's contributions through his patents exemplify significant advancements in thermal and electrostatic technologies. His work continues to inspire future innovations and showcases the importance of collaboration and ingenuity in the ever-evolving landscape of technology.

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