The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2015
Filed:
Jul. 06, 2012
Alfred Grant Elliot, Palo Alto, CA (US);
Dennis George Rex, Sunnyvale, CA (US);
Alexander Veytser, Mountain View, CA (US);
Brent Donald Alfred Elliot, Cupertino, CA (US);
Frank Balma, Los Gatos, CA (US);
Richard Erich Schuster, Milpitas, CA (US);
Alfred Grant Elliot, Palo Alto, CA (US);
Dennis George Rex, Sunnyvale, CA (US);
Alexander Veytser, Mountain View, CA (US);
Brent Donald Alfred Elliot, Cupertino, CA (US);
Frank Balma, Los Gatos, CA (US);
Richard Erich Schuster, Milpitas, CA (US);
Component Re-Engineering Company, Inc., Santa Clara, CA (US);
Abstract
A method for the joining of a ceramic shaft and a ceramic plate into an assembly, such as a heater, adapted to be used in semiconductor processing. The joined pieces are adapted to withstand the environments within a process chamber during substrate processing, chamber cleaning processes, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The ceramic pieces may be aluminum nitride and the pieces may be brazed with aluminum. The joint material is adapted to withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The joint is adapted to provide a hermetic seal across the joint. The joined pieces are adapted to be separated at a later time should rework or replacement of one of the pieces be desired.