The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Mar. 15, 2013
Component Re-engineering Company, Inc., Santa Clara, CA (US);
Alfred Grant Elliot, Palo Alto, CA (US);
Brent Donald Alfred Elliot, Cupertino, CA (US);
Frank Balma, Los Gatos, CA (US);
Richard Erich Schuster, Milpitas, CA (US);
Dennis George Rex, Williams, OR (US);
Alexander Veytser, Mountain View, CA (US);
Component Re-Engineering Company, Inc., Santa Clara, CA (US);
Abstract
A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.