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San Francisco, CA, United States of America

Richard A Yarussi

USPTO Granted Patents = 11

Average Co-Inventor Count = 2.5

ph-index = 7

Forward Citations = 246(Granted Patents)

Location History:

Mountain View, CA (US) (2001)
San Francisco, CA (US) (2003 - 2012)

Company Filing History:

Nanometrics Inc.

Years Active: 2001-2012

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8259297 - Scanning focal length metrology (2012-09-04),

2. 8259296 - Scanning focal length metrology (2012-09-04),

3. 7697135 - Scanning focal length metrology (2010-04-13),

4. 7372565 - Spectrometer measurement of diffracting structures (2008-05-13),

5. 7295314 - Metrology/inspection positioning system (2007-11-13),

6. 7289215 - Image control in a metrology/inspection positioning system (2007-10-30),

7. 7115858 - Apparatus and method for the measurement of diffracting structures (2006-10-03),

8. 6665070 - Alignment of a rotatable polarizer with a sample (2003-12-16),

9. 6522406 - Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer (2003-02-18),

10. 6320609 - System using a polar coordinate stage and continuous image rotation to compensate for stage rotation (2001-11-20),

11. 6181427 - Compact optical reflectometer system (2001-01-30),

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