The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2001
Filed:
Jul. 06, 1999
Richard A. Yarussi, Mountain View, CA (US);
Blaine R. Spady, San Jose, CA (US);
Nanometrics Incorporated, Sunnyvale, CA (US);
Abstract
A highly compact reflectometer system (,) for obtaining reflectance data and images from a sample (,). The reflectometer includes a light source (,) for generating a beam (Bi), a beam splitter (,) for transmitting a portion of the beam toward the sample, a lens (,) for focusing the transmitted light onto the sample, a video camera (,) for viewing a field of view (,) created by the light focused on the sample, and a spectrometer (,) for detecting and analyzing the spectrum of the light reflected from the sample. The reflectometer preferably includes a number of fold mirrors (FM,-FM,) which make the reflectometer highly compact.