Company Filing History:
Years Active: 2004-2014
Title: Ren Zhou: Innovator in Semiconductor Technology
Introduction
Ren Zhou is a prominent inventor based in Fremont, California, known for his significant contributions to semiconductor technology. With a total of nine patents to his name, Zhou has made remarkable advancements in the field, particularly in the areas of electrode assemblies and chemical mixing systems.
Latest Patents
Zhou's latest patents include innovative designs aimed at improving semiconductor processing. One of his notable inventions is the "Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch." This patent describes an electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly features a backing member with a bonding surface, an inner electrode with a lower surface and a bonding surface, and an outer electrode with similar characteristics. A unique aspect of this design is that at least one of the electrodes has a flange extending underneath a portion of the lower surface of the other electrode, which helps minimize contamination.
Another significant patent is the "System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system." This invention outlines a method for mixing two or more chemicals for a Chemical Mechanical Planarization (CMP) system. The method involves delivering a first chemical to a point of use mixer at a specific flow rate, followed by a second chemical at a different flow rate. The flow of both chemicals is controlled upon demand, allowing for precise mixing that can be utilized in CMP processes.
Career Highlights
Ren Zhou is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to focus on developing cutting-edge technologies that enhance semiconductor manufacturing processes.
Collaborations
Zhou has collaborated with talented individuals such as Xuyen Pham and Tuan Anh Nguyen, contributing to a dynamic work environment that fosters innovation and creativity.
Conclusion
Ren Zhou's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his role as a key innovator in the field. His inventions not only advance the technology but also pave the way for future developments in semiconductor processing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.