The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Apr. 19, 2004
Xuyen Pham, Fremont, CA (US);
Tuan Nguyen, San Jose, CA (US);
Vien Quach, San Jose, CA (US);
Ren Zhou, Fremont, CA (US);
Xuyen Pham, Fremont, CA (US);
Tuan Nguyen, San Jose, CA (US);
Vien Quach, San Jose, CA (US);
Ren Zhou, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method of mixing two or more chemicals such as for a CMP system. The method includes delivering a first chemical to a first inlet port of a point of use mixer at a first flow rate, delivering a second chemical to a second inlet port of the point of use mixer at a second flow rate, controlling the flow of the first and second chemicals into the mixer upon demand for a mixture of the first and second chemicals and balancing the flow of the first and second chemicals into the mixer. The mixture can also be output such as to a CMP process. A system for mixing two or more chemicals is also described.