Company Filing History:
Years Active: 2008-2016
Title: Inventor Spotlight: Qinghua Zhong
Introduction
Qinghua Zhong is a prominent inventor based in Fremont, California, known for his significant contributions in the field of semiconductor technology. With a total of 8 patents to his name, he has made notable advancements that enhance the performance and efficiency of semiconductor processing.
Latest Patents
Among his latest innovations, Qinghua Zhong has developed methods and systems for the optimization of Critical Dimension Uniformity (CDU) during substrate processing. This patent focuses on identifying operational parameters of semiconductor chambers configured to deliver pulsed radio frequency (RF) signals. By conducting various tests that adjust the duty cycle of the pulsed RF, he measures critical dimensions (CD) and CDU for features in the substrate, leading to enhanced manufacturing precision.
Another notable invention is his work on residue-free systems and methods for isotropically etching silicon in confined spaces. This technology utilizes a combination of nitrogen trifluoride, molecular hydrogen gas, and plasma generation in a processing chamber. The innovative approach facilitates efficient etching of dummy structures while maintaining the integrity of significant features, critical for modern semiconductor devices.
Career Highlights
Qinghua Zhong is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work in optimizing semiconductor processing techniques plays a crucial role in advancing manufacturing capabilities and ensuring high-quality production of microelectronics.
Collaborations
Throughout his career, Qinghua has collaborated with talented individuals in the semiconductor field, including notable coworkers like Gowri Kota and Frank Lin. Together, they contribute to ongoing research and development efforts aimed at enhancing semiconductor technologies.
Conclusion
Qinghua Zhong's innovations have undoubtedly impacted the semiconductor landscape, making him a remarkable inventor in Fremont, California. With a strong focus on optimizing processing techniques and improving manufacturing precision, his patented technologies continue to pave the way for advancements in the semiconductor industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.