Tainan, Taiwan

Pin-Chia Su


Average Co-Inventor Count = 3.7

ph-index = 2

Forward Citations = 13(Granted Patents)


Location History:

  • Shanhua Township, TW (2010)
  • Tainan, TW (2004 - 2013)
  • Shanhua, TW (2014)

Company Filing History:


Years Active: 2004-2014

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7 patents (USPTO):Explore Patents

Title: The Innovations of Pin-Chia Su

Introduction

Pin-Chia Su is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on improving processes and systems related to silicon wafers, which are essential components in the manufacturing of electronic devices.

Latest Patents

Among his latest patents is a process for silicon wafer reclamation. This innovative etchant is designed to remove a porous low-k dielectric layer on a semiconductor substrate. It includes a hydrofluoric acid-based solvent, a dilating additive for enlarging the pores in the porous low-k dielectric, and a passivating additive that forms a protective layer at the interface between the low-k dielectric layer and the semiconductor substrate. Another significant patent is a system for securely dechucking wafers. This system comprises a wafer stage with a chuck support for holding a chuck, which is responsible for receiving and attaching the work piece. The system also features a support lift mechanism, a driving means for gradually raising the support lift, and a controller that regulates the process based on a variable quantity.

Career Highlights

Pin-Chia Su has worked with prominent companies in the semiconductor industry, including Taiwan Semiconductor Manufacturing Company Ltd. and Lam Research Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor manufacturing.

Collaborations

Throughout his career, Pin-Chia Su has collaborated with talented individuals such as Chung-Tsung Lu and Yu-Chih Liou. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Pin-Chia Su's contributions to the semiconductor industry through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the field, paving the way for future innovations in technology.

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