This inventor holds 3 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2003-2005.
Company Filing History:
Years Active: 2003-2005
Title: Pei-Fen Chou: Innovator in Semiconductor Technology
Introduction
Pei-Fen Chou is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on methods that enhance the efficiency and effectiveness of semiconductor devices.
Latest Patents
Pei-Fen Chou's latest patents include innovative methods that address critical challenges in semiconductor manufacturing. One of his patents is titled "Method and apparatus for determining two dimensional doping profiles with SIMS." This invention outlines a method for forming a SIMS monitor device that determines the doping profile of a semiconductor device structure. The process involves creating a monitor device with regularly repeating semiconductor structures, planarizing it to reveal a target surface, and sputtering the target surface while detecting species ejected according to a secondary ion mass spectroscopy procedure.
Another significant patent is the "Method of wet etching low dielectric constant materials." This method utilizes an aqueous solution of hydrofluoric acid and hydrochloric acid to etch low dielectric constant materials, particularly those that are water-repulsive or hydrophobic. The specific weight ratio of hydrofluoric acid to hydrochloric acid in the solution ranges from 1:3 to 4:1, making it a versatile solution for various applications.
Career Highlights
Pei-Fen Chou is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative approaches have contributed to the advancement of semiconductor technologies, making him a valuable asset to his company.
Collaborations
Pei-Fen has collaborated with notable colleagues, including Yi-Lung Cheng and Ming-Hwa Yoo. These collaborations have fostered an environment of innovation and have led to the development of groundbreaking technologies in the semiconductor field.
Conclusion
Pei-Fen Chou's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future advancements in semiconductor manufacturing.