Location History:
- San Jose, CA (US) (2013)
- Dublin, CA (US) (2014 - 2018)
- Pleasanton, CA (US) (2016 - 2024)
Company Filing History:
Years Active: 2013-2024
Title: The Innovative Contributions of Patrick Reilly
Introduction
Patrick Reilly is a prolific inventor based in Dublin, California, known for his remarkable contributions to the field of semiconductor manufacturing. With a total of 16 patents to his name, Reilly has made significant advancements, particularly in the Plasma-Enhanced Chemical Vapor Deposition (PECVD) process, which is essential for modern technology.
Latest Patents
Among his noteworthy inventions is a method of processing a substrate according to a PECVD process. This innovative method involves adjusting the temperature profile of the substrate to influence the deposition rate profile across it. Additionally, he adjusts the plasma density profile and heats the chamber surfaces exposed to the plasma to enhance plasma density uniformity while minimizing the formation of low-quality deposits. Furthermore, Reilly incorporates in situ metrology to monitor the progress of the deposition process and can trigger control actions involving substrate temperature profile, plasma density profile, pressure, temperature, and flow of reactants.
Career Highlights
Throughout his career, Patrick Reilly has contributed to major companies in the semiconductor industry, such as Applied Materials, Inc. and Lam Research Corporation. His expertise in the field has led to his recognition as a significant innovator, especially in the domain of deposition technologies.
Collaborations
Reilly has had the opportunity to work alongside esteemed colleagues, including Shahid Shaikh and Bok Hoen Kim. These collaborations have fostered a rich environment for innovation, allowing for the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Patrick Reilly’s innovative mindset and dedication to advancing semiconductor manufacturing processes have established him as a prominent figure in his field. His ongoing contributions continue to pave the way for future advancements in technology, reflecting the impact of inventors on modern industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.