Norio Semba

Title: **Innovative Contributions of Norio Semba in Semiconductor Technology**

Introduction

Norio Semba, an accomplished inventor based in Kikuchi-gun, Japan, has made significant strides in the field of semiconductor technology. With an impressive portfolio of 15 patents, Semba's innovations have greatly impacted the efficiency and functionality of treatment apparatuses used in wafer processing.

Latest Patents

One of Semba's notable inventions involves a treatment apparatus and method that enhances the wafer treatment process. This apparatus utilizes gas from a source, which is exposed to an atmosphere above a liquid surface in a tank, thus preserving the liquid. The gas is subsequently supplied around a wafer in a treatment chamber, ensuring that it flows uniformly from the perimeter toward the center. This design incorporates a heating mechanism to perform heat treatment while a humidified gas is introduced to prevent drying, essential for maintaining the resist pattern on the wafer.

Another recent patent focuses on an air feeder designed to supply conditioned air with a specific temperature and humidity into a resist coating unit. This invention incorporates a cooling section, a bypass, heating and humidifying sections, along with a blower, allowing for efficient energy usage and compact temperature control. By optimizing the air supply, Semba’s innovation enhances the overall performance and efficiency of the coating and developing system.

Career Highlights

Throughout his career, Norio Semba has contributed to prestigious companies, including Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His roles in these organizations have allowed him to spearhead advancements in semiconductor manufacturing and treatment technologies.

Collaborations

Semba has worked alongside notable professionals in the field, including Masami Akimoto and Keizo Hasebe. These collaborations have fostered an environment of innovation, leading to the development of groundbreaking technologies that continue to shape the industry.

Conclusion

Norio Semba stands out as a pivotal figure in the field of semiconductor technology, leveraging his expertise to develop innovative solutions that improve wafer processing methodologies. His dedication to enhancing the efficiency and performance of treatment systems through his patents reflects his commitment to advancing semiconductor technology. As industries evolve, Semba's contributions will undoubtedly continue to play a critical role in technological advancements.