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For the Inventor, By the Inventor

Iwate, Japan

Noriaki Koyama

This inventor holds 13 USPTO granted patents and 3 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2010-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Noriaki Koyama. Retrieved from https://idiyas.com/inventor/noriaki-koyama

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 13 

% Patents Active = 100.0

Average Co-Inventor Count = 2.5

ph-index = 2

Forward Citations = 17(Granted Patents)


Location History:

  • Tokyo-To, JP (2010)
  • Oshu, JP (2011 - 2017)
  • Iwate, JP (2011 - 2020)
  • Yamanashi, JP (2023)

Company Filing History:

goldMedal13 out of 10,933 
 
Tokyo Electron Limited
 patents

Years Active: 2010-2026

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13 patents (USPTO):Explore Patents
1. 12709805 - TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS (2026-08-18),
2. 11822319 - Semiconductor system (2023-11-21),
3. 11567485 - Substrate processing system and method for monitoring process data (2023-01-31),
4. 10734291 - Abnormality detection apparatus (2020-08-04),
5. 9703284 - Group management system and recording medium (2017-07-11),
6. 8355808 - Server device of group management system having function of performing fault detection and program (2013-01-15),
7. 8190283 - Server and program (2012-05-29),
8. 8121799 - Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wire (2012-02-21),
9. 8055391 - Server device and program (2011-11-08),
10. 7974729 - Server device and program with sub-recipe measurement communication (2011-07-05),
11. 7896649 - Heat system, heat method, and program (2011-03-01),
12. 7869888 - Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium (2011-01-11),
13. 7751921 - Semiconductor manufacturing apparatus, method of detecting abnormality, identifying cause of abnormality, or predicting abnormality in the semiconductor manufacturing apparatus, and storage medium storing computer program for performing the method (2010-07-06),

Title: Noriaki Koyama: Innovator in Semiconductor Technology

Introduction

Noriaki Koyama is a prominent inventor based in Iwate, Japan, known for his significant contributions to semiconductor technology. With a total of 12 patents to his name, Koyama has made remarkable advancements in the field, particularly in semiconductor manufacturing systems.

Latest Patents

One of Koyama's latest patents is a semiconductor system that facilitates the sharing of information between two semiconductor manufacturing apparatuses through direct communication. This innovative system includes a first acquisition unit that gathers information from the first apparatus, a storage unit for retaining this information, and a communication unit that transmits the data to the second apparatus. The second apparatus is equipped with its own acquisition, storage, and communication units, along with an analysis unit that evaluates the state of the apparatus based on the received information. Additionally, it features an information generation unit that visualizes the analysis results for better understanding.

Another notable patent is a substrate processing system designed to monitor process data effectively. This system comprises an acquiring unit that collects process data during various steps of a predetermined process, an extracting unit that categorizes the data into fluctuating and converging sections, and a monitoring unit that compares evaluation values of the data against set limits to ensure optimal performance.

Career Highlights

Koyama is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing industry. His work has significantly impacted the efficiency and effectiveness of semiconductor production processes.

Collaborations

Koyama has collaborated with notable colleagues, including Minoru Obata and Nobutoshi Terasawa, who have contributed to his innovative projects and advancements in semiconductor technology.

Conclusion

Noriaki Koyama's contributions to semiconductor technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His inventions continue to shape the future of semiconductor manufacturing, demonstrating the importance of innovation in technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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