The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Sep. 09, 2020
Tokyo Electron Limited, Tokyo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A semiconductor system shares information on a semiconductor manufacturing apparatus between first and second semiconductor manufacturing apparatuses through direct communication. The first semiconductor manufacturing apparatus includes a first acquisition unit acquiring first information on the first semiconductor manufacturing apparatus, a first storage unit storing the acquired first information, and a first communication unit sending the stored first information to the second semiconductor manufacturing apparatus. The second semiconductor manufacturing apparatus includes a second acquisition unit acquiring second information on the second semiconductor manufacturing apparatus, a second storage unit storing the acquired second information, a second communication unit receiving the first information sent from the first semiconductor manufacturing apparatus, an analysis unit analyzing a state of the second semiconductor manufacturing apparatus based on the received first information and the stored second information, an information generation unit generating information visualizing an analysis result, and a display unit displaying the generated information.