The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2011
Filed:
May. 29, 2007
Noriaki Koyama, Oshu, JP;
Minoru Obata, Nirasaki, JP;
Wenling Wang, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A information processing apparatusfor processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatusfor performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portionfor receiving the set value; a state value receiving portionfor receiving the acquired value; a correction amount calculating portionfor calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portionfor correcting the acquired value received by the state value receiving portion, using the correction amount calculated by the correction amount calculating portion; and an output portionfor outputting a result of correction performed by the correcting portion