The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2020
Filed:
Nov. 01, 2017
Tokyo Electron Limited, Tokyo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
Disclosed is an abnormality detection apparatus including: a collection unit that collects state information indicating a state of each part of a semiconductor manufacturing apparatus in a predetermined cycle; a storage unit that stores the state information collected by the collection unit as a log for each predetermined unit; an arithmetic unit that generates a monitoring band for monitoring the state of each part of the semiconductor manufacturing apparatus, based on the log; and a determination unit that determines whether the state of each part of the semiconductor manufacturing apparatus is abnormal, based on the state information and the monitoring band.
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