Location History:
- Santa Clara, CA (US) (2020 - 2022)
- Cupertino, CA (US) (2019 - 2023)
Company Filing History:
8 out of 13,741 
2 out of 916 
Years Active: 2019-2024
Title: Nobuyuki Sasaki: Innovator in Tungsten Gap Fill Technology
Introduction
Nobuyuki Sasaki is a prominent inventor based in Cupertino, CA, known for his significant contributions to the field of semiconductor manufacturing. With a total of 10 patents to his name, he has made remarkable advancements in methods for tungsten gap fill technology.
Latest Patents
Sasaki's latest patents focus on innovative methods for low resistivity and stress tungsten gap fill. One of his notable inventions involves a method for forming tungsten gap fill on structures, including high aspect ratio structures. This method includes depositing a tungsten liner using a physical vapor deposition (PVD) process with high ionization and an ambient gas of argon or krypton. The PVD process is performed at temperatures ranging from approximately 20 degrees Celsius to approximately 300 degrees Celsius. Additionally, the method incorporates a nitridation process and utilizes a chemical vapor deposition (CVD) process to deposit bulk fill tungsten, forming a seam suppressed boron-free tungsten fill. The CVD process operates at temperatures between approximately 300 degrees Celsius and approximately 500 degrees Celsius, and at pressures from approximately 5 Torr to approximately 300 Torr.
Career Highlights
Throughout his career, Nobuyuki Sasaki has worked with leading companies in the semiconductor industry, including Applied Materials, Inc. and Varian Semiconductor Equipment Associates, Inc. His expertise in tungsten gap fill technology has positioned him as a key figure in advancing semiconductor manufacturing processes.
Collaborations
Sasaki has collaborated with notable professionals in the field, including Tom Ho Wing Yu and Jianxin Lei. These collaborations have contributed to the development of innovative solutions in semiconductor technology.
Conclusion
Nobuyuki Sasaki's work in tungsten gap fill technology has significantly impacted the semiconductor industry. His innovative methods and collaborations with industry leaders continue to drive advancements in this critical field.