The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Jun. 04, 2018
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Rajesh Prasad, Lexington, MA (US);
Tzu-Yu Liu, Somerville, MA (US);
Kyu-Ha Shim, Andover, MA (US);
Tom Ho Wing Yu, Campbell, CA (US);
Zhong Qiang Hua, Saratoga, CA (US);
Adolph Miller Allen, Oakland, CA (US);
Viabhav Soni, Sunnyvale, CA (US);
Ravi Rajagopalan, San Jose, CA (US);
Nobuyuki Sasaki, Cupertino, CA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
A method may include depositing a carbon layer on a substrate using physical vapor deposition, wherein the carbon layer exhibits compressive stress, and is characterized by a first stress value; and directing a dose of low-mass species into the carbon layer, wherein, after the directing, the carbon layer exhibits a second stress value, less compressive than the first stress value.