Nae Hak Park

Title: Innovations of Nae Hak Park in Semiconductor Technology

Introduction

Nae Hak Park is a prominent inventor based in Seoul, South Korea, known for his significant contributions to semiconductor technology. With a total of five patents to his name, Park has developed innovative methods that enhance the efficiency and reliability of semiconductor devices.

Latest Patents

One of Park's latest patents is a method for forming a plug of a semiconductor device. This method involves sequentially forming a conductive film and an insulation film over a semiconductor substrate that has both high and low density regions. The high density region contains a greater number of structures than the low density region. The process includes a first chemical mechanical polishing (CMP) step that selectively removes the insulating film to expose the conductive film. Following this, a second CMP process is performed to remove the conductive film and the insulating film, thereby exposing the structures in the high density region.

Another notable patent is a method for forming a metal line of a semiconductor device. This method addresses the challenges posed by large aspect ratios of contact holes. It involves burying the contact holes using a chemical vapor deposition (CVD) method with high density plasma, simplifying the line process to improve reliability. The steps include forming an insulating film with a contact hole on a semiconductor substrate, applying a barrier metal layer on the insulating film, and then forming a metal line layer on the barrier metal layer using the CVD method.

Career Highlights

Throughout his career, Nae Hak Park has worked with leading companies in the semiconductor industry, including LG Semicon Co., Ltd. and Hyundai Electronics Industries Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Park has collaborated with notable colleagues, including Chang Soo Kim and Yun Hee Kim, who have played a role in his innovative projects. Their teamwork has fostered an environment of creativity and technical excellence.

Conclusion

Nae Hak Park's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the development of more efficient and reliable semiconductor devices.