Myungjun Lee

This inventor holds 15 USPTO granted patents and 8 published patent applications, primarily in Semiconductor Metrology. Top assignees: Samsung Electronics Co., Ltd., Boston University. Active years: 2022-2025.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Myungjun Lee. Retrieved from https://idiyas.com/inventor/myungjun-lee-kgxxvc6k

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 15 (Patent Applications = 8)

% Patents Active = 100.0

Average Co-Inventor Count = 5.5

ph-index = 2

Forward Citations = 7(Granted Patents)

Company Filing History:

15 out of 132,108

Samsung Electronics Co., Ltd.

where one patent can have more than one assignee

Years Active: 2022-2025

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Areas of Expertise:

Substrate Inspection

Semiconductor Measurement

Scanning Electron Microscope

Pupil Ellipsometry

Digital Holography

Holographic Microscope

Metrology Apparatus

Through-Focus Imaging

Coherent Diffraction Imaging

Multi-Scale Spectral Imaging

Inspection Methods

Fabrication Techniques

15 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12405226 - Substrate inspection apparatus and substrate inspection method (2025-09-02),

2. 12347096 - Semiconductor measurement apparatus (2025-07-01),

3. 12307650 - Scanning electron microscope device, semiconductor manufacturing device, and method of controlling semiconductor manufacturing device (2025-05-20),

4. 12228499 - Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method (2025-02-18),

5. 12222282 - Semiconductor measurement apparatus (2025-02-11),

6. 12045009 - Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM (2024-07-23),

7. 12038718 - Holographic microscope and manufacturing method of semiconductor device using the same (2024-07-16),

8. 12002698 - Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method (2024-06-04),

9. 11988495 - Through-focus image-based metrology device, operation method thereof, and computing device for executing the operation (2024-05-21),

10. 11972960 - Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method (2024-04-30),

11. 11726046 - Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods (2023-08-15),

12. 11604136 - Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method (2023-03-14),

13. 11428947 - Super-resolution holographic microscope (2022-08-30),

14. 11314205 - Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM (2022-04-26),

15. 11275034 - Inspection apparatus and method based on coherent diffraction imaging (CDI) (2022-03-15),

Title: Myungjun Lee: Innovator in Semiconductor Technology

Introduction

Myungjun Lee is a prominent inventor based in Seongnam-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 15 patents. His innovative work focuses on improving substrate inspection and measurement apparatuses, which are crucial for the semiconductor manufacturing process.

Latest Patents

Among his latest patents is a substrate inspection apparatus and method. This apparatus includes a light irradiator with an objective lens and multiple optical fibers. The objective lens is designed to irradiate light onto an illumination area of a semiconductor substrate that contains various circuit pattern layers. The optical fibers are positioned around the objective lens to illuminate the peripheral area adjacent to the illumination area. Additionally, a light generator is incorporated to adjust the irradiation angle of the light, allowing selective illumination of the objective lens and optical fibers. A light analyzer is also part of this invention, which captures images of the circuit pattern layers and measures the overlay between them.

Another notable patent is a semiconductor measurement apparatus. This device features an illumination apparatus with a polarizer, an optical assembly with an objective lens, and a beam splitter that directs reflected light to two sensors. The controller in this apparatus determines the alignment state of patterns in different regions of the sample using images captured by the sensors.

Career Highlights

Myungjun Lee has worked with leading organizations in the technology sector, including Samsung Electronics and Boston University. His experience in these prestigious companies has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Throughout his career, Myungjun Lee has collaborated with notable colleagues such as Wookrae Kim and Jaehwang Jung. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Myungjun Lee's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in the industry, showcasing the importance of innovation in technology.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

8 patents pending: