The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2026
Filed:
Jul. 16, 2024
Samsung Electronics Co., Ltd., Suwon-si, KR;
Junho Shin, Suwon-si, KR;
Wookrae Kim, Suwon-si, KR;
Hyungjin Kim, Suwon-si, KR;
Seungbeom Park, Suwon-si, KR;
Jangwoon Sung, Suwon-si, KR;
Myungjun Lee, Suwon-si, KR;
Hojun Lee, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A semiconductor inspection apparatus includes a light source portion configured to output a first beam, an extreme-ultraviolet filter disposed in a path of the first beam output from the light source portion and configured to separate extreme-ultraviolet light from the first beam, and an inspection portion including a detector apparatus configured detect scattered light, wherein the inspection portion further includes an inspection portion optical system comprising a variable mirror module disposed in a path of the extreme-ultraviolet light.