Gwangju, South Korea

Seungbeom Park

USPTO Granted Patents = 5 

Average Co-Inventor Count = 5.9

ph-index = 1


Company Filing History:


Years Active: 2022-2025

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5 patents (USPTO):Explore Patents

Title: Seungbeom Park: Innovator in Semiconductor Technology

Introduction

Seungbeom Park is a prominent inventor based in Gwangju, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His innovative work focuses on improving substrate inspection and wafer processing methods.

Latest Patents

Among his latest patents is a substrate inspection apparatus and method. This apparatus includes a light irradiator with an objective lens and multiple optical fibers. The objective lens is designed to illuminate a semiconductor substrate with various circuit pattern layers. The optical fibers are strategically placed to enhance the inspection of the peripheral areas adjacent to the illumination zone. Additionally, a light generator is incorporated to adjust the irradiation angle, allowing for selective light distribution. The light analyzer captures images of the circuit layers and models them to measure overlay accuracy.

Another notable patent is the wafer processing apparatus, which features an X-θ stage unit with a rotary chuck. This unit allows for movement in the X direction and rotation in the θ direction, accommodating wafers with edge portions. The apparatus includes an edge bead removal measurement unit to inspect the bead removal state and measure eccentricity. Furthermore, it has an edge exposure process unit that corrects eccentricity before exposing the wafer's edge portion.

Career Highlights

Seungbeom Park has worked with leading organizations, including Samsung Electronics and Boston University. His experience in these institutions has significantly influenced his innovative approach to semiconductor technology.

Collaborations

He has collaborated with notable colleagues such as Myungjun Lee and Jaehyeon Son, contributing to advancements in their respective fields.

Conclusion

Seungbeom Park's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to impact the efficiency and effectiveness of semiconductor processing methods.

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