The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2024

Filed:

Oct. 01, 2020
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Seungbeom Park, Gwangju, KR;

Sungmin Park, Seoul, KR;

Jaehyeon Son, Hwaseong-si, KR;

Heejun Ahn, Seoul, KR;

Myungjun Lee, Seongnam-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03H 1/00 (2006.01); G01N 21/95 (2006.01); G02B 21/00 (2006.01); G03H 1/04 (2006.01); G03H 1/16 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G03H 1/0005 (2013.01); G01N 21/9501 (2013.01); G01N 21/9503 (2013.01); G02B 21/0016 (2013.01); G03H 1/0443 (2013.01); G03H 1/16 (2013.01); H01L 22/12 (2013.01); G03H 2001/005 (2013.01); G03H 2001/045 (2013.01); G03H 2001/0452 (2013.01);
Abstract

Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.


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