Location History:
- Ballston Court, NY (US) (2020)
- Ballston Lake, NY (US) (2019 - 2023)
Company Filing History:
6 out of 5,671 
1 out of 530 
1 out of 941 Years Active: 2019-2023
Title: The Innovative Contributions of Minghao Tang
Introduction
Minghao Tang is a prominent inventor based in Ballston Lake, NY (US). He has made significant contributions to the field of measurement technology, holding a total of 8 patents. His work focuses on advanced techniques for overlay measurement, which are crucial in various manufacturing processes.
Latest Patents
One of Minghao Tang's latest patents is titled "Self-referencing and self-calibrating interference pattern overlay measurement." This innovative method involves the formation of two pairs of alignment targets on different masks. One target is aligned, while the other is misaligned by a bias distance, producing a first pair of conjugated interference patterns. Additional pairs of alignment targets are created to generate a second pair of conjugated interference patterns that are inverted compared to the first. The misalignment of the dark and light regions of both pairs is determined when the patterns are overlaid. A magnification factor is calculated as a ratio of the difference in misalignment of the dark and light regions over twice the bias distance. The interference pattern misalignment is then divided by this magnification factor to yield a self-referenced and self-calibrated target misalignment amount, which is subsequently output.
Career Highlights
Minghao Tang has worked with notable companies in the technology sector, including GlobalFoundries Inc. and Kla Corporation. His experience in these organizations has allowed him to refine his skills and contribute to cutting-edge innovations in the field.
Collaborations
Minghao has collaborated with talented individuals such as Dongyue Yang and Xintuo Dai, further enhancing the impact of his work through teamwork and shared expertise.
Conclusion
Minghao Tang's innovative contributions to measurement technology and his extensive patent portfolio highlight his significant role in advancing the field. His work continues to influence various industries, showcasing the importance of innovation in technology.