Location History:
- Yokosuka, JP (2002 - 2009)
- Kanagawa-ken, JP (2005 - 2014)
- Yokohama, JP (1999 - 2016)
- Kanagawa, JP (2014 - 2018)
Company Filing History:
14 out of 52,711 
3 out of 265 
2 out of 42,485 
Years Active: 1999-2018
Title: Michio Sato: Innovator in Plasma Technology
Introduction
Michio Sato is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of plasma technology, holding a total of 17 patents. His innovative work focuses on enhancing the performance and durability of components used in plasma processing apparatuses.
Latest Patents
Sato's latest patents include a "Component for Plasma Apparatus and Method of Manufacturing the Same." This invention features a base material made of metal or ceramics, with an aluminum nitride coating formed on its outermost surface. The coating is created through impact sintering and contains fine particles with a diameter of 1 µm or less. The thickness of the aluminum nitride coating is no less than 10 µm, and its film density is at least 90%. The invention also specifies the area ratios of aluminum nitride particles, ensuring strong resistance to plasma and radical attacks.
Another notable patent is the "Component for Plasma Processing Apparatus and Method for Manufacturing Component for Plasma Processing Apparatus." This invention describes a component that includes a base material, an underlayer, and a yttrium oxide film. The underlayer consists of a metal oxide film with a thermal conductivity of 35 W/m·K or less. The yttrium oxide film has a thickness of 10 µm or more and a film density of 96% or more, with specific area coverage ratios for particulate and non-particulate portions.
Career Highlights
Throughout his career, Michio Sato has worked with notable companies such as Kabushiki Kaisha Toshiba and Toshiba Materials Co., Ltd. His experience in these organizations has contributed to his expertise in developing advanced materials for plasma applications.
Collaborations
Sato has collaborated with esteemed colleagues, including Yoshiharu Fukasawa and Toshihiro Maki. These partnerships have fostered innovation and the exchange of ideas in the field of plasma technology.
Conclusion
Michio Sato's contributions to plasma technology through his numerous patents highlight his role as a leading inventor in this specialized field. His work continues to influence advancements in plasma processing apparatuses, showcasing the importance of innovation in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.