IDiyas

For the Inventor, By the Inventor

Palo Alto, CA, United States of America

Michelle T Schulberg

USPTO Granted Patents = 6

Average Co-Inventor Count = 5.2

ph-index = 6

Forward Citations = 1,219(Granted Patents)


Location History:

  • Palo Alto, CA (US) (2002 - 2007)
  • Newton, MA (US) (2009)

Company Filing History:

goldMedal5 out of 993 
 
Novellus Systems Incorporated
 patents
silverMedal1 out of 832,680 
Other
 patents

Years Active: 2002-2009

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6 patents (USPTO):Explore Patents
1. 7589028 - Hydroxyl bond removal and film densification method for oxide films using microwave post treatment (2009-09-15),
2. 7208389 - Method of porogen removal from porous low-k films using UV radiation (2007-04-24),
3. 7176144 - Plasma detemplating and silanol capping of porous dielectric films (2007-02-13),
4. 6951765 - Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor (2005-10-04),
5. 6576345 - Dielectric films with low dielectric constants (2003-06-10),
6. 6340628 - Method to deposit SiOCH films with dielectric constant below 3.0 (2002-01-22),
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