Los Altos, CA, United States of America

Michael Tucker

This inventor holds 15 USPTO granted patents and 3 published patent applications, primarily in Charged Particle Beam Lithography. Top assignee: D2s, Inc.. Active years: 2010-2016.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Michael Tucker. Retrieved from https://idiyas.com/inventor/michael-tucker

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 15 

% Patents Active = 73.3

Average Co-Inventor Count = 2.0

ph-index = 7

Forward Citations = 156(Granted Patents)


Company Filing History:


Years Active: 2010-2016

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Areas of Expertise:
Charged Particle Beam Lithography
Integrated Circuit Manufacturing
Pattern Formation
Curvilinear Patterns
Circular Patterns
Mask Data Preparation
Reticle Design
Shaped Beam Technology
Semiconductor Devices
Surface Engineering
Pattern Fracturing
Writing Systems
15 patents (USPTO):Explore Patents

Title: Spotlight on Inventor Michael Tucker: Innovating Semiconductor Technology

Introduction

Michael Tucker, based in Los Altos, California, is a prolific inventor recognized for his contributions to semiconductor production technology. With a remarkable portfolio of 15 patents, Tucker stands out within his field for his innovative methods that enhance the precision and efficiency of charged particle beam lithography.

Latest Patents

Tucker's recent patents showcase cutting-edge advancements in semiconductor technology. The first, titled "Method for Fracturing and Forming a Pattern Using Shaped Beam Charged Particle Beam Lithography," presents a sophisticated system for mask data preparation and proximity effect correction. This method accepts a non-circular target pattern and calculates the necessary shots from a multi-beam charged particle system to create a precise pattern on a surface, ensuring that it adheres to specified tolerances through advanced computing hardware.

Additionally, Tucker has developed a "Method for Forming Circular Patterns on a Surface." This inventive approach focuses on determining a series of shots that deliver a circular dosage pattern, employing a stencil with multiple circular apertures to produce various circular patterns on the surface by adjusting the shot dosage.

Career Highlights

Michael Tucker's career has been marked by significant achievements in the field of semiconductor technology. His role at D2s, Inc., a company specializing in innovative imaging technologies for the semiconductor manufacturing industry, has provided a platform for his numerous inventions. His deep understanding of charged particle beam lithography continues to position him as a leader in this evolving sector.

Collaborations

Throughout his career, Tucker has collaborated with esteemed industry professionals, including Akira Fujimura and Harold Robert Zable. These partnerships underscore the collaborative spirit of innovation within the semiconductor community, as they work together to drive technological advancement.

Conclusion

In summary, Michael Tucker's contributions to the semiconductor industry are invaluable, reflected in his 15 patents and ongoing innovations. His work at D2s, Inc. and collaboration with notable figures exemplify the dedication required to advance technology in real-world applications. As he continues to innovate, Tucker remains an influential figure in the pursuit of enhanced semiconductor manufacturing processes.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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