Michael Carris

Title: The Innovations of Michael Carris

Introduction

Michael Carris is a notable inventor based in Tualatin, Oregon. He holds a total of 9 patents that showcase his contributions to the field of semiconductor technology. His work primarily focuses on developing advanced materials and processes that enhance the performance of electronic devices.

Latest Patents

One of Carris's latest patents is for tensile dielectric films using UV curing. This innovation involves generating a highly tensile dielectric layer on a heat-sensitive substrate without exceeding thermal budget constraints. The use of ultraviolet (UV) irradiation allows for the production of films that can be utilized in strained NMOS transistor architectures. The UV curing process has demonstrated the ability to produce films with stresses of at least 1.65 E10 dynes/cm. Another significant patent is for low-K silicon carbide copper diffusion barrier films. These films are designed to have low dielectric constants, making them suitable for various copper/inter-metal dielectric integration schemes. The copper diffusion barrier films consist of one or more layers of silicon carbide, with at least one layer containing a composition of over 40% carbon. This high carbon-content layer results in a reduced effective dielectric constant compared to conventional barrier materials.

Career Highlights

Throughout his career, Michael Carris has made significant strides in the semiconductor industry. He has worked with prominent companies, including Novellus Systems Incorporated, where he contributed to the development of innovative technologies. His expertise in materials science and engineering has positioned him as a key player in advancing semiconductor fabrication techniques.

Collaborations

Carris has collaborated with several talented individuals in his field, including Yongsik Yu and Karen Billington. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Michael Carris's contributions to the field of semiconductor technology through his patents and collaborations highlight his innovative spirit and dedication to advancing electronic materials. His work continues to influence the industry and pave the way for future advancements.