Company Filing History:
21 out of 1,409 
4 out of 83 
2 out of 75 
Years Active: 2010-2025
Title: **Michael Budach: Innovator in Photolithography Technology**
Introduction
Michael Budach, an accomplished inventor based in Hanau, Germany, holds a remarkable portfolio of 25 patents. His innovative contributions primarily focus on advancements in photolithography, a vital process in the production of microchips and other electronic components. Through his pioneering work, Budach has made significant strides in enhancing the efficiency and accuracy of photolithographic techniques.
Latest Patents
Among his latest inventions are two noteworthy patents. The first patent proposes a method and apparatus for disposing of excess material from a photolithographic mask. This innovative method involves enlarging the surface area of the excess material, utilizing a scanning probe microscope to displace it, and subsequently removing the displaced material effectively.
The second patent addresses devices and methods for examining and processing elements meant for photolithography. This cutting-edge device employs a beam of charged particles to acquire measurement data while the element is exposed. Additionally, it incorporates a trained machine learning model and predictive filter to anticipate and adjust for drift in the beam, ensuring precision during the photolithographic process.
Career Highlights
Budach's impressive career includes significant tenures at renowned companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMS Ltd. His work in these organizations has helped shape the future of photolithography, contributing to the development of technologies that are critical in various industries, including semiconductors and electronics.
Collaborations
Throughout his career, Michael Budach has collaborated with esteemed colleagues, including Klaus Edinger and Christof Baur. These partnerships have further enhanced his work and pushed the boundaries of innovation within the field of photolithography.
Conclusion
Michael Budach exemplifies the spirit of innovation through his substantial contributions to photolithography. With 25 patents to his name, he continues to influence the industry and inspire future advancements in technology. His ongoing dedication to research and development underscores the vital role inventors play in driving technological progress in a fast-evolving world.