Millstatt, Austria

Michael Brugger

USPTO Granted Patents = 15 

 

Average Co-Inventor Count = 2.7

ph-index = 4

Forward Citations = 34(Granted Patents)


Company Filing History:


Years Active: 2011-2018

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15 patents (USPTO):Explore Patents

Title: Innovations by Michael Brugger: Pioneering Wafer Processing Technology

Introduction

Michael Brugger is an accomplished inventor based in Millstatt, Austria, with a remarkable portfolio of 15 patents. His work primarily focuses on innovative methods and apparatuses for wafer wet processing, significantly advancing the capabilities of the semiconductor industry.

Latest Patents

Among his latest patents, Brugger has developed a "Method and Apparatus for Wafer Wet Processing." This invention features a gas dispenser that is notably smaller than the wafer-shaped articles being processed. This gas dispenser is mobile, allowing it to operate laterally while dispensing inert gas above the articles. Another significant invention is the "Apparatus for Liquid Treatment of Wafer-Shaped Articles." This device includes a spin chuck designed to hold a wafer at a specific distance from its upper surface, featuring a treatment assembly that enhances the treatment process without hindering the operation of upwardly projecting gripping pins.

Career Highlights

Brugger is currently employed at Lam Research AG, a company renowned for its advancements in semiconductor manufacturing equipment. His impactful contributions to the field underscore his commitment to innovation and technological excellence.

Collaborations

Throughout his career, Brugger has collaborated with esteemed colleagues, including Otto Lach and Ante Plazonic. Their collective efforts have contributed to the development of state-of-the-art solutions in the wafer processing domain.

Conclusion

Through his innovations and patent contributions, Michael Brugger is redefining the landscape of wafer processing technology. His dedication to invention not only showcases his expertise but also plays a pivotal role in advancing the semiconductor industry.

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