The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Dec. 18, 2009
Applicants:
Michael Brugger, Millstatt, AT;
Otto Lach, Treffen, AT;
Inventors:
Michael Brugger, Millstatt, AT;
Otto Lach, Treffen, AT;
Assignee:
Lam Research AG, Villach, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 11/02 (2006.01); B25B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Improved resistance to temperature-related degradation or deformation in a wafer-supporting chuck is provided by at least one shielding member that physically and/or thermally shields chuck components from effects of elevated temperature processing fluids.